Ultra-High Vacuum (UHV) Translation Stages
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Description
Background The National Institute of Standards and Technology (NIST) is embarking on a project to support the Extreme Ultraviolet Lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light. Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This requirement supports the �Optical Metrology for EUV Generation� Project under Grand Challenge 2, �Advanced Metrology for Future Microelectronics Manufacturing,� for CHIPS R&D Metrology. This requirement enables NIST to construct an ultra-high vacuum microscope to operate in NIST Synchrotron Ultraviolet Research Facility (SURF III) EUV reflectometer beamline. The microscope will allow for the measurement of EUV scintillator efficiency, output spectrum and point spread function. Minimum Capabilities that NIST Requires and for Which Information is Being Requested DRAFT MINIMUM REQUIREMENTS Description: UHV translation stages Quantity: 10 Technical Specifications Ultra-high vacuum compatible: low-outgassing materials, pressure range 10-8 Torr or better: Polyimide or PTFE insulated wire cables with braided, silver-plated copper shielding. All Stainless steel (18-8 or similar) hardware and plain finish materials (no anodization or paint). Stainless steel bearings lubricated with UHV-compatible lubricants (10-9 Torr or better rated at room temperature, no silicone-based lubricants) Vented holes or vented hardware used in unvented blind holes. Minimum bake out temperature 100�C. Travel Range: 50 mm minimum, 55 mm maximum Crossed roller bearing travel with piezo-electric…